Simultek produces two types of NUV Sources. One of them has a power of up to 5 kW, the other type is more low-power and has an output power of 0.2kW – 2 kW. The powerful NUV Source is capable of producing near-UV radiation (200-400 nm) with an intensity of up to 10 Equivalent Suns (ES) at 254 nm. The NUV Source is adapted for installation on a vacuum chamber. The NUV System features a vertically oriented 2-5 kW Mercury lamp. The system has a special chiller unit cooled by water. These NUV sources have the following features: • Wavelength range: 290-400 nm • Beam size: Φ150 mm, Φ200 mm, and Φ300 mm, or per customer request • High Efficiency, Uniform, DUV lamp based Light source System Light source Systems • 200W, 350W, 500W, 1,000W, and 2,000W Systems • Irradiation intensity: ≥ 5 ES, adjustable between 0.2-5 ES with accuracy of adjustment ≤ 0.1 ES, controllable @280 nm, 310 nm, or 405 nm • High Stability and Precise Intensity Controlling Powersupply • Shutter Controller (0.1-999.9, in 0.1 increments, Seconds or Minutes) • Remote Panel and Computer Interface • Power requirements: 208 V, 3 Phase, 60 Hz or 380 V, 3 Phase, 50 Hz (in vase of a 2,000W System) All models have such features: • Mercury NUV lamp (depends from the model); • NUV lamp housing; • Parabolic reflector; • Cooling system (air or water, depends from lamp power); • IR filter; • NUV intensity control sensors; • 5,000 W power supply; and • Mechanical attachment to vacuum chamber. Each model can be equipped with an optical system for collimation or beam focusing.

The Simultek Vacuum-UV (VUV) Source includes: • Hamamatsu VUV-L12542 VUV Deuterium lamp with Magnesium Fluoride window. • Power Supply for Deuterium lamp. • Housing with air-cooling system. • Vacuum flange adaptor. The Hamamatsu L12542 is a newly developed Electrostatic Charge Remover that makes use of VUV light. The features of the Hamamatsu L12542 light source include: • Long life; • Large irradiation area; • Highly efficient ion generation in a vacuum; • No water-cooling required; • Wavelength: 115-200 nm, simulated with high power deuterium lamp; • Simulated intensity: 2-10 Suns, maximum 10 Suns (at 40 cm, radiation area Ф300 mm), uniformity (at 40 cm, 2 Suns): > 90%; • The radiation area at 40 cm is Ф300 mm; • The number of Hamamatsu L12542 Deuterium Lamps will be chosen based on the required VUV intensity (2-10 Suns) and radiation area (Ф300 mm area at 40 cm);

The lamp house is designed to efficiently collect the energy from a 3.0 kW Xenon ARC lamp and focus as much of the lamp’s energy as possible onto an optical integrator, then imaged onto a collimating mirror. • Wavelength range: 400-1200 nm • Beam size: Φ200 mm, Φ300 mm, Φ400 mm, and Φ600 mm • Adjustable power, regulation precision: 5% • Collimation: ± 2.0⁰ half angle (@1 ES) • Uniformity: ± 5% over entire beam area • AM0 Air Mass Filter and AM1.5G Filter • Output energy: 1,300 W/m2 @ AM0; 1,000 W/m2 @AM1.5G • Irradiance instability within 8 hours: ≤ ±2% Optics: • 3.0K W Xenon short ARC lamp • Electroformed reflector assembly • First surface folding mirror • Optical integrator • Collimating mirror • AM0 Air Mass Filter • AM1.5G Filter Mechanical: • Lamp mounted on X-Y-Z focus mechanism • Air cooled shutter assembly • Mounting flange: ISO-F 320 (in case of Φ300 mm beam size) Power requirements: 220 VAC, 50 A, Current Regulated Powersupply

Proton Source (SimulTek PS 50) Features: • Unpolarized beam flood-type source • Energy: 10-50 keV, continuously adjustable • Flux density: 10¹² cm^-2s^-1 • Acceleration factor: up to 100 • Beam current density: 0-160 nA/cm², continuously adjustable • Total beam current: 0-50 μA, continuously adjustable • Lifetime of hot cathodes: >100 hrs • Effective beam dia: Ф6”-7” • Irradiation distance: 15”-19” • Mounting flange- CF 8” • Fully computer-controlled Electron Source (SimulTek ES 50) Features: • Unpolarized beam flood-type source • Energy: 10-50 keV, continuously adjustable • Flux density: 10¹² cm^-2s^-1 • Acceleration factor: up to 100 • Beam current 10 nA to 5 mA, continuously adjustable • Lifetime of the filament >500 hrs • Effective beam dia: Ф10mm-500mm • Irradiation distance: 5- 25” • Mounting flange- CF 4.5”- CF 6” • Fully computer-controlled

Microwave AO Source (SimulTek-MAOS) Features: • Energy of Thermal (microwave) AO Source: 0.05~0.1 eV • Flux of AO (at 40 cm): > 1.0×10¹⁸ atoms/cm²/s • Diameter of the AO beam (at 40cm): at least 200 mm